Thermal Donors in Silicon Implanted with Rare Earth Impurities |
| Journal |
Solid State Phenomena (Volumes 82 - 84) |
| Volume |
Gettering anf Defect Engineering in Semiconductor Technology IX |
| Edited by |
V. Raineri, F. Priolo, M. Kittler and H. Richter |
| Pages |
93-98 |
| DOI |
10.4028/www.scientific.net/SSP.82-84.93 |
| Citation |
Valentin V. Emtsev et al., 2001, Solid State Phenomena, 82-84, 93 |
| Authors |
Valentin V. Emtsev, C.A.J. Ammerlaan, Boris A. Andreev, Gagik A. Oganesyan, D.S. Poloskin, Elena I. Shek, N.A. Sobolev |
| Keywords |
Implantation, Rare Earth Ion, Silicon, Thermal Donor |
| Full Paper |
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