Paper Title:
Interfacial Oxygen Thermodonor Formation in Plasma-Hydrogenated Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
99-104
DOI
10.4028/www.scientific.net/SSP.82-84.99
Citation
G.N. Kamaev, V.V. Bolotov, S.A. Chern'aev, M.D. Efremov, "Interfacial Oxygen Thermodonor Formation in Plasma-Hydrogenated Silicon", Solid State Phenomena, Vols. 82-84, pp. 99-104, 2002
Online since
November 2001
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Price
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