Interfacial Oxygen Thermodonor Formation in Plasma-Hydrogenated Silicon |
| Journal |
Solid State Phenomena (Volumes 82 - 84) |
| Volume |
Gettering anf Defect Engineering in Semiconductor Technology IX |
| Edited by |
V. Raineri, F. Priolo, M. Kittler and H. Richter |
| Pages |
99-104 |
| DOI |
10.4028/www.scientific.net/SSP.82-84.99 |
| Citation |
G.N. Kamaev et al., 2001, Solid State Phenomena, 82-84, 99 |
| Authors |
G.N. Kamaev, V.V. Bolotov, S.A. Chern'aev, M.D. Efremov |
| Keywords |
Hydrogen in Silicon, Hydrogen Plasma, Oxygen in Silicon, Oxygen-Related Thermal Donors, Silicon |
| Full Paper |
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