Paper Title:

Defects Involving Oxygen in Crystalline Silicon

Periodical Solid State Phenomena (Volumes 85 - 86)
Main Theme Defect Interaction and Clustering in Semiconductors
Edited by S. Pizzini
Pages 285-316
DOI 10.4028/www.scientific.net/SSP.85-86.285
Citation A. Sassella, 2001, Solid State Phenomena, 85-86, 285
Authors A. Sassella
Keywords Concentration Measurement, Device Performance, Oxygen Impurity, Oxygen Precipitation, Precipitate Morphology, Precipitate Study
Price US$ 28,-
Share
Article Preview
View full size