Defects Involving Oxygen in Crystalline Silicon |
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| Journal | Solid State Phenomena (Volumes 85 - 86) |
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| Volume | Defect Interaction and Clustering in Semiconductors |
| Edited by | S. Pizzini |
| Pages | 285-316 |
| DOI | 10.4028/www.scientific.net/SSP.85-86.285 |
| Citation | A. Sassella, 2001, Solid State Phenomena, 85-86, 285 |
| Authors | A. Sassella |
| Keywords | Concentration Measurement, Device Performance, Oxygen Impurity, Oxygen Precipitation, Precipitate Morphology, Precipitate Study |
| Full Paper | 
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