Interaction of Small Molecules with Silicon Surfaces |
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| Journal | Solid State Phenomena (Volumes 85 - 86) |
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| Volume | Defect Interaction and Clustering in Semiconductors |
| Edited by | S. Pizzini |
| Pages | 337-352 |
| DOI | 10.4028/www.scientific.net/SSP.85-86.337 |
| Citation | Dario Narducci, 2001, Solid State Phenomena, 85-86, 337 |
| Authors | Dario Narducci |
| Keywords | Adsorption, Cleaning, Etching, Hydrogenation, Oxidation, Reconstruction, Relaxation, Self-Assembly, Silicon, Surface |
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