Paper Title:
Future Challenges for Cleaning in Advanced Microelectronics
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
1-6
DOI
10.4028/www.scientific.net/SSP.92.1
Citation
A. Bowling, B. K. Kirkpatrick, T. Hurd, L. Losey, P. Matz, "Future Challenges for Cleaning in Advanced Microelectronics", Solid State Phenomena, Vol. 92, pp. 1-6, 2003
Online since
May 2003
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Price
$32.00
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