Paper Title:
Effect of Additives on the Removal Efficiency of Photoresist by Ozone/DI-Water Processes: Experimental Study
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
101-104
DOI
10.4028/www.scientific.net/SSP.92.101
Citation
H. Vankerckhoven, F. De Smedt, M. Claes, S. De Gendt, M. M. Heyns, C. Vinckier, "Effect of Additives on the Removal Efficiency of Photoresist by Ozone/DI-Water Processes: Experimental Study", Solid State Phenomena, Vol. 92, pp. 101-104, 2003
Online since
May 2003
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Price
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