Formation of Time-Dependent Haze on Silicon Wafers |
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| Journal | Solid State Phenomena (Volume 92) |
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| Volume | Ultra Clean Processing of Silicon Surfaces VI |
| Edited by | Marc Heyns, Paul Mertens and Marc Meuris |
| Pages | 109-112 |
| DOI | 10.4028/www.scientific.net/SSP.92.109 |
| Citation | N. Münter et al., 2003, Solid State Phenomena, 92, 109 |
| Authors | N. Münter, Bernd O. Kolbesen, W. Storm, Timo Müller |
| Keywords | Copper (Cu), Localized Light Scatters, Time-Dependent Haze |
| Full Paper | 
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