Wet Etch Enhancement of HfO2 Films by Implant Processing |
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| Journal | Solid State Phenomena (Volume 92) |
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| Volume | Ultra Clean Processing of Silicon Surfaces VI |
| Edited by | Marc Heyns, Paul Mertens and Marc Meuris |
| Pages | 11-14 |
| DOI | 10.4028/www.scientific.net/SSP.92.11 |
| Authors | Joel Barnett, Deborah J. Riley, Troy C. Messina, Pat Lysaght, Ron Carpio |
| Keywords | High-k, Wet Etch |
| Full Paper | 
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