Paper Title:
Wet Etch Enhancement of HfO2 Films by Implant Processing
  Abstract

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Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
11-14
DOI
10.4028/www.scientific.net/SSP.92.11
Citation
J. Barnett, D. J. Riley, T. C. Messina, P. Lysaght, R. Carpio, "Wet Etch Enhancement of HfO2 Films by Implant Processing", Solid State Phenomena, Vol. 92, pp. 11-14, 2003
Online since
May 2003
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Price
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