Paper Title:
Compatibility of Supercritical Co2-Based Stripping with Porous Ultra Low-k Materials and Copper
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
113-116
DOI
10.4028/www.scientific.net/SSP.92.113
Citation
C. Millet, A. Danel, M. Ndour, F. Tardif, "Compatibility of Supercritical Co2-Based Stripping with Porous Ultra Low-k Materials and Copper", Solid State Phenomena, Vol. 92, pp. 113-116, 2003
Online since
May 2003
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Price
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