Paper Title:
Backside Cleaning for Copper Removal
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
121-124
DOI
10.4028/www.scientific.net/SSP.92.121
Citation
C. T. Richard, F. Guyader, K. Barla, "Backside Cleaning for Copper Removal", Solid State Phenomena, Vol. 92, pp. 121-124, 2003
Online since
May 2003
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Price
$32.00
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