Paper Title:
Evaluation of Organic Contamination on Si Wafers in Fab Environments
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
125-128
DOI
10.4028/www.scientific.net/SSP.92.125
Citation
J. S. Jeon, C. Wong, S. Ohsiek, H. S. Kim, B. Ogle, "Evaluation of Organic Contamination on Si Wafers in Fab Environments", Solid State Phenomena, Vol. 92, pp. 125-128, 2003
Online since
May 2003
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.