Paper Title:
Selective Wet Etching of High-k Gate Dielectrics
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
129-131
DOI
10.4028/www.scientific.net/SSP.92.129
Citation
K. K. Christenson, B. Schwab, T. J. Wagener, B. Rosengren, D. J. Riley, J. Barnett, "Selective Wet Etching of High-k Gate Dielectrics", Solid State Phenomena, Vol. 92, pp. 129-131, 2003
Online since
May 2003
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Price
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