Paper Title:
Investigation of Particle Removal from Silicon Surfaces by Means of Dry and Steam Laser Cleaning
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
133-134
DOI
10.4028/www.scientific.net/SSP.92.133
Citation
P. Leiderer, M. Mosbacher, J. Boneberg, C. Bartels, F. Lang, C. R.M. Afonso, D. Baeuerle, "Investigation of Particle Removal from Silicon Surfaces by Means of Dry and Steam Laser Cleaning", Solid State Phenomena, Vol. 92, pp. 133-134, 2003
Online since
May 2003
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Price
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