Effect of Transient pH on Particle Deposition during Immersion Rinsing |
| Journal |
Solid State Phenomena (Volume 92) |
| Volume |
Ultra Clean Processing of Silicon Surfaces VI |
| Edited by |
Marc Heyns, Paul Mertens and Marc Meuris |
| Pages |
139-142 |
| DOI |
10.4028/www.scientific.net/SSP.92.139 |
| Citation |
Wim Fyen et al., 2003, Solid State Phenomena, 92, 139 |
| Authors |
Wim Fyen, Kai Dong Xu, Rita Vos, Guy Vereecke, Paul W. Mertens, Marc M. Heyns |
| Keywords |
Diffusion, Particle Deposition, pH Shock, Rinsing |
| Full Paper |
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