Paper Title:
Influence of Hardware and Chemistry on the Removal of Nano-Particles in a Megasonic Cleaning Tank
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
143-146
DOI
10.4028/www.scientific.net/SSP.92.143
Citation
G. Vereecke, M. M. Heyns, R. Vos, M. Schmidt, F. Holsteyns, M. Baeyens, S. Gomme, J. Snow, P. W. Mertens, V. Coenen, T. Bauer, "Influence of Hardware and Chemistry on the Removal of Nano-Particles in a Megasonic Cleaning Tank", Solid State Phenomena, Vol. 92, pp. 143-146, 2003
Online since
May 2003
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Price
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