Influence of Frequency on the Removal Efficiency of Nano-Particles in a Megasonic Spray Cleaning Tool |
| Journal |
Solid State Phenomena (Volume 92) |
| Volume |
Ultra Clean Processing of Silicon Surfaces VI |
| Edited by |
Marc Heyns, Paul Mertens and Marc Meuris |
| Pages |
147-150 |
| DOI |
10.4028/www.scientific.net/SSP.92.147 |
| Citation |
M. Schmidt et al., 2003, Solid State Phenomena, 92, 147 |
| Authors |
M. Schmidt, Guy Vereecke, Rita Vos, Frank Holsteyns, M. Baeyens, Paul W. Mertens |
| Keywords |
Frequency, Megasonics, Particle Removal, Wet Cleaning |
| Full Paper |
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