Paper Title:
Behaviour of High-k Dielectric Materials with Classical Cleaning Chemistries
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
15-18
DOI
10.4028/www.scientific.net/SSP.92.15
Citation
E. Bellandi, B. Crivelli, M. Alessandri, "Behaviour of High-k Dielectric Materials with Classical Cleaning Chemistries", Solid State Phenomena, Vol. 92, pp. 15-18, 2003
Online since
May 2003
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Price
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