Paper Title:
A Theoretical and Experimental Study of Damage-Free BEOL Cleaning with Megasonic Agitation
  Abstract

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Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
151-156
DOI
10.4028/www.scientific.net/SSP.92.151
Citation
J. M. Lauerhaas, Y. Wu, M. Bran, B. Fraser, E. Brause, T. Nicolosi, "A Theoretical and Experimental Study of Damage-Free BEOL Cleaning with Megasonic Agitation", Solid State Phenomena, Vol. 92, pp. 151-156, 2003
Online since
May 2003
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Price
$32.00
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