Relation between Particle Density and Haze on a Wafer: a New Approach to Measuring Nano-Sized Particles |
| Journal |
Solid State Phenomena (Volume 92) |
| Volume |
Ultra Clean Processing of Silicon Surfaces VI |
| Edited by |
Marc Heyns, Paul Mertens and Marc Meuris |
| Pages |
161-164 |
| DOI |
10.4028/www.scientific.net/SSP.92.161 |
| Citation |
Kai Dong Xu et al., 2003, Solid State Phenomena, 92, 161 |
| Authors |
Kai Dong Xu, Rita Vos, Guy Vereecke, Marcel Lux, Wim Fyen, Frank Holsteyns, Karine Kenis, Paul W. Mertens, Marc M. Heyns, Chris Vinckier |
| Keywords |
Contamination, Haze, LPD |
| Full Paper |
Get the full paper by clicking here
|
