Paper Title:
Relation between Particle Density and Haze on a Wafer: a New Approach to Measuring Nano-Sized Particles
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
161-164
DOI
10.4028/www.scientific.net/SSP.92.161
Citation
K. D. Xu, R. Vos, G. Vereecke, M. Lux, W. Fyen, F. Holsteyns, K. Kenis, P. W. Mertens, M. M. Heyns, C. Vinckier, "Relation between Particle Density and Haze on a Wafer: a New Approach to Measuring Nano-Sized Particles", Solid State Phenomena, Vol. 92, pp. 161-164, 2003
Online since
May 2003
Keywords
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.