Paper Title:
Forced Vapour-Phase Decomposition (FVPD) in Combination with e.g. TXRF - a Method to Determine Contamination in Silicon
  Abstract

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Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
171-174
DOI
10.4028/www.scientific.net/SSP.92.171
Citation
I. Rink, "Forced Vapour-Phase Decomposition (FVPD) in Combination with e.g. TXRF - a Method to Determine Contamination in Silicon", Solid State Phenomena, Vol. 92, pp. 171-174, 2003
Online since
May 2003
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Price
$32.00
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