Introduction of High-k Materials into Wet Processing, Analysis and Behavior |
| Journal |
Solid State Phenomena (Volume 92) |
| Volume |
Ultra Clean Processing of Silicon Surfaces VI |
| Edited by |
Marc Heyns, Paul Mertens and Marc Meuris |
| Pages |
19-22 |
| DOI |
10.4028/www.scientific.net/SSP.92.19 |
| Citation |
Bart Onsia et al., 2003, Solid State Phenomena, 92, 19 |
| Authors |
Bart Onsia, David Hellin, M. Claes, A. Maes, Stefan De Gendt, Marc M. Heyns |
| Keywords |
High-k Analysis, High-k Cleaning, High-k Contamination |
| Full Paper |
Get the full paper by clicking here
|
