Paper Title:
Introduction of High-k Materials into Wet Processing, Analysis and Behavior
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
19-22
DOI
10.4028/www.scientific.net/SSP.92.19
Citation
B. Onsia, D. Hellin, M. Claes, A. Maes , S. De Gendt, M. M. Heyns, "Introduction of High-k Materials into Wet Processing, Analysis and Behavior", Solid State Phenomena, Vol. 92, pp. 19-22, 2003
Online since
May 2003
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Price
$32.00
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