Introduction of High-k Materials into Wet Processing, Analysis and Behavior |
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| Journal | Solid State Phenomena (Volume 92) |
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| Volume | Ultra Clean Processing of Silicon Surfaces VI |
| Edited by | Marc Heyns, Paul Mertens and Marc Meuris |
| Pages | 19-22 |
| DOI | 10.4028/www.scientific.net/SSP.92.19 |
| Authors | Bart Onsia, David Hellin, M. Claes, A. Maes, Stefan De Gendt, Marc M. Heyns |
| Keywords | High-k Analysis, High-k Cleaning, High-k Contamination |
| Full Paper | 
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