Paper Title:
Cleaning of Si Surfaces by Lamp Illumination
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
195-198
DOI
10.4028/www.scientific.net/SSP.92.195
Citation
A. Danel, C. L. Tsai, K. Shanmugasundaram, F. Tardif, E. Kamieniecki, J. Ruzyllo, "Cleaning of Si Surfaces by Lamp Illumination", Solid State Phenomena, Vol. 92, pp. 195-198, 2003
Online since
May 2003
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Price
$32.00
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