Paper Title:
Advanced Cylindrical Capacitor Formation Using Gas-Phase Selective Etching
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
203-206
DOI
10.4028/www.scientific.net/SSP.92.203
Citation
R. Hanestad, B. Schwab, J. W. Butterbaugh, K. T. Lee, W. G. Shim , S. Y. Kim, Y. P. Han , "Advanced Cylindrical Capacitor Formation Using Gas-Phase Selective Etching", Solid State Phenomena, Vol. 92, pp. 203-206, 2003
Online since
May 2003
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Price
$32.00
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