Metallic Impurity Contamination from Tungsten Gate Cleaning |
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| Journal | Solid State Phenomena (Volume 92) |
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| Volume | Ultra Clean Processing of Silicon Surfaces VI |
| Edited by | Marc Heyns, Paul Mertens and Marc Meuris |
| Pages | 23-26 |
| DOI | 10.4028/www.scientific.net/SSP.92.23 |
| Authors | Geun Min Choi, Tadahiro Ohmi |
| Keywords | Cleaning, Cross-Contamination, Metallic Impurity, Tungsten-Gate |
| Full Paper | 
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