Paper Title:
Metallic Impurity Contamination from Tungsten Gate Cleaning
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
23-26
DOI
10.4028/www.scientific.net/SSP.92.23
Citation
G. M. Choi, T. Ohmi, "Metallic Impurity Contamination from Tungsten Gate Cleaning", Solid State Phenomena, Vol. 92, pp. 23-26, 2003
Online since
May 2003
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Price
$32.00
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