Paper Title:

Novel Photoresist Removal Using Atomic Hydrogen Generated by Heated Catalyzer

Periodical Solid State Phenomena (Volume 92)
Main Theme Ultra Clean Processing of Silicon Surfaces VI
Edited by Marc Heyns, Paul Mertens and Marc Meuris
Pages 231-234
DOI 10.4028/www.scientific.net/SSP.92.231
Citation T. Miki et al., 2003, Solid State Phenomena, 92, 231
Authors T. Miki, Akira Izumi, H. Matsumura
Keywords Atomic Hydrogen, Heated Catalyzer, Photoresist Removal
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