Paper Title:
Novel Photoresist Removal Using Atomic Hydrogen Generated by Heated Catalyzer
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
231-234
DOI
10.4028/www.scientific.net/SSP.92.231
Citation
T. Miki, A. Izumi, H. Matsumura, "Novel Photoresist Removal Using Atomic Hydrogen Generated by Heated Catalyzer", Solid State Phenomena, Vol. 92, pp. 231-234, 2003
Online since
May 2003
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Price
$32.00
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