Paper Title:
'Resist / Wet Etch' Couple for Dual Gate Oxide
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
235-238
DOI
10.4028/www.scientific.net/SSP.92.235
Citation
A. Beverina, I. Guilmeau, J.P. Carrere, N. Emonet, F. Guyader, V. Huard, S. Petitdidier, R. Velard, "'Resist / Wet Etch' Couple for Dual Gate Oxide", Solid State Phenomena, Vol. 92, pp. 235-238, 2003
Online since
May 2003
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Price
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