Paper Title:
New Contact Cleaning in HF & N2/H2 Microwave Plasma
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
239-242
DOI
10.4028/www.scientific.net/SSP.92.239
Citation
Y.B. Kim, J. H. Kim, Y. M. Lee, G. G. Lee, J. Y. Kim, J. C. Ku, J. O. Ryu, "New Contact Cleaning in HF & N2/H2 Microwave Plasma", Solid State Phenomena, Vol. 92, pp. 239-242, 2003
Online since
May 2003
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Price
$32.00
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