Paper Title:
Ammonium Nitrate Cleaning Process for Post Metal Photo-Resister Removing
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
251-254
DOI
10.4028/www.scientific.net/SSP.92.251
Citation
C.-H. Lo, F. Y. Chen, "Ammonium Nitrate Cleaning Process for Post Metal Photo-Resister Removing", Solid State Phenomena, Vol. 92, pp. 251-254, 2003
Online since
May 2003
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Price
$32.00
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