Paper Title:
Resist Strip and Cu Diffusion Barrier Etch in Cu BEOL Integration Schemes in a Mattson HighlandsTM Chamber
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
267-270
DOI
10.4028/www.scientific.net/SSP.92.267
Citation
G. Mannaert, M. Van Cauwenberghe, M. Schmidt, J. Van Aelst, D. Hendrickx, M. Stucchi, T. Conard, S. Vanhaelemeersch, W. Boullart, "Resist Strip and Cu Diffusion Barrier Etch in Cu BEOL Integration Schemes in a Mattson HighlandsTM Chamber", Solid State Phenomena, Vol. 92, pp. 267-270, 2003
Online since
May 2003
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Price
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