Paper Title:
Single Chemistry Cleaning Solutions for Advanced Wafer Cleaning
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
27-32
DOI
10.4028/www.scientific.net/SSP.92.27
Citation
R. Vos, M. Lux, S. Arnauts, K. Kenis, M. Maes, B. Onsia, J. Snow, F. Holsteyns, G. Vereecke, P. W. Mertens, M. M. Heyns, O. Doll, A. Fester, B. O. Kolbesen, T. Hackett , M. Hoffman, "Single Chemistry Cleaning Solutions for Advanced Wafer Cleaning", Solid State Phenomena, Vol. 92, pp. 27-32, 2003
Online since
May 2003
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Price
$32.00
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