Paper Title:
Tribological Characterization of Post-CMP Brush Scrubbbing
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
275-280
DOI
10.4028/www.scientific.net/SSP.92.275
Citation
A. Philipossian, L. Mustapha , "Tribological Characterization of Post-CMP Brush Scrubbbing", Solid State Phenomena, Vol. 92, pp. 275-280, 2003
Online since
May 2003
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Price
$32.00
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