Paper Title:
Defectivity Study of Cu Metallization Process by Dark- and Bright-Field Inspection
  Abstract

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Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
281-286
DOI
10.4028/www.scientific.net/SSP.92.281
Citation
L. Carbonell, F. Holsteyns, Z. Tőkei, L. O'Reilly, K. Maex, P. W. Mertens, "Defectivity Study of Cu Metallization Process by Dark- and Bright-Field Inspection", Solid State Phenomena, Vol. 92, pp. 281-286, 2003
Online since
May 2003
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Price
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