Paper Title:
New Dry Tool after Cleaning of Low-k Dielectrics
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
287-292
DOI
10.4028/www.scientific.net/SSP.92.287
Citation
S. Okuda, H. Sugimoto, A. Hashizume , H. Tsujikawa, M. Imai, G. Asai, "New Dry Tool after Cleaning of Low-k Dielectrics", Solid State Phenomena, Vol. 92, pp. 287-292, 2003
Online since
May 2003
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Price
$32.00
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