Paper Title:
Supercritical Carbon Dioxide Processing of Porous Methylsilsesquioxane(PMSQ) Low-k Dielectric Films
  Abstract

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Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
293-296
DOI
10.4028/www.scientific.net/SSP.92.293
Citation
H. J. Martinez, T. Jacobs, J. Wolf, L. Rothman, "Supercritical Carbon Dioxide Processing of Porous Methylsilsesquioxane(PMSQ) Low-k Dielectric Films", Solid State Phenomena, Vol. 92, pp. 293-296, 2003
Online since
May 2003
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Price
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