Paper Title:
Supercritical Carbon Dioxide Cleaning of Low-k Material
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
297-300
DOI
10.4028/www.scientific.net/SSP.92.297
Citation
G. Asai, Y. Muraoka , K. Saito, I. Mizobata, T. Iwata, K. Masuda, K. Iijima , T. Yoshikawa, D. Peters, "Supercritical Carbon Dioxide Cleaning of Low-k Material", Solid State Phenomena, Vol. 92, pp. 297-300, 2003
Online since
May 2003
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Price
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