Single Chemistry Cleaning with Complexing Agents (CAs): Determination of CA-Lifetimes by UV/VIS-Spectroscopy |
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| Journal | Solid State Phenomena (Volume 92) |
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| Volume | Ultra Clean Processing of Silicon Surfaces VI |
| Edited by | Marc Heyns, Paul Mertens and Marc Meuris |
| Pages | 33-36 |
| DOI | 10.4028/www.scientific.net/SSP.92.33 |
| Authors | O. Doll, Bernd O. Kolbesen |
| Keywords | CA-Lifetime, Complexing Agent, Single Chemistry Cleaning, UV/VIS-Spectroscopy |
| Full Paper | 
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