Complexing Agents Employed in Single Chemistry Cleaning: Stability Studies Using HPLC |
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| Journal | Solid State Phenomena (Volume 92) |
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| Volume | Ultra Clean Processing of Silicon Surfaces VI |
| Edited by | Marc Heyns, Paul Mertens and Marc Meuris |
| Pages | 37-40 |
| DOI | 10.4028/www.scientific.net/SSP.92.37 |
| Authors | S. Metzger, Bernd O. Kolbesen |
| Keywords | Complexing Agent, HPLC, Single Chemistry Cleaning, Stability in Peroxide |
| Full Paper | 
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