Stability and Residue Studies of Complexing Agents in SC-1 Bath |
| Journal |
Solid State Phenomena (Volume 92) |
| Volume |
Ultra Clean Processing of Silicon Surfaces VI |
| Edited by |
Marc Heyns, Paul Mertens and Marc Meuris |
| Pages |
41-44 |
| DOI |
10.4028/www.scientific.net/SSP.92.41 |
| Citation |
Heini Saloniemi et al., 2003, Solid State Phenomena, 92, 41 |
| Authors |
Heini Saloniemi, Simo Eränen, Raimo A. Ketola, Juha Kokkonen, Sari Lehto, Kaija Luomanperä, Pertti Vastamäki, Heli Sirén, Olli Anttila |
| Keywords |
Complexing Agent, SC-1, Stability |
| Full Paper |
Get the full paper by clicking here
|
