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Stability and Residue Studies of Complexing Agents in SC-1 Bath

Journal Solid State Phenomena (Volume 92)
Volume Ultra Clean Processing of Silicon Surfaces VI
Edited by Marc Heyns, Paul Mertens and Marc Meuris
Pages 41-44
DOI 10.4028/www.scientific.net/SSP.92.41
Citation Heini Saloniemi et al., 2003, Solid State Phenomena, 92, 41
Authors Heini Saloniemi, Simo Eränen, Raimo A. Ketola, Juha Kokkonen, Sari Lehto, Kaija Luomanperä, Pertti Vastamäki, Heli Sirén, Olli Anttila
Keywords Complexing Agent, SC-1, Stability
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