Stability and Residue Studies of Complexing Agents in SC-1 Bath |
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| Journal | Solid State Phenomena (Volume 92) |
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| Volume | Ultra Clean Processing of Silicon Surfaces VI |
| Edited by | Marc Heyns, Paul Mertens and Marc Meuris |
| Pages | 41-44 |
| DOI | 10.4028/www.scientific.net/SSP.92.41 |
| Authors | Heini Saloniemi, Simo Eränen, Raimo A. Ketola, Juha Kokkonen, Sari Lehto, Kaija Luomanperä, Pertti Vastamäki, Heli Sirén, Olli Anttila |
| Keywords | Complexing Agent, SC-1, Stability |
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