Materials Science & Technology

FULLTEXT SEARCH
NEW: Advanced Search

Stability and Residue Studies of Complexing Agents in SC-1 Bath

Journal Solid State Phenomena (Volume 92)
Volume Ultra Clean Processing of Silicon Surfaces VI
Edited by Marc Heyns, Paul Mertens and Marc Meuris
Pages 41-44
DOI 10.4028/www.scientific.net/SSP.92.41
Authors Heini Saloniemi, Simo Eränen, Raimo A. Ketola, Juha Kokkonen, Sari Lehto, Kaija Luomanperä, Pertti Vastamäki, Heli Sirén, Olli Anttila
Keywords Complexing Agent, SC-1, Stability
Full Paper PDF Get the full paper by clicking here

First page example