Paper Title:
Metallic Contamination Removal Evaluation for Single Wafer Processing
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
49-52
DOI
10.4028/www.scientific.net/SSP.92.49
Citation
P. Boelen , S. Verhaverbeke, P. Garnier, D. Levy , H. Morinaga, "Metallic Contamination Removal Evaluation for Single Wafer Processing", Solid State Phenomena, Vol. 92, pp. 49-52, 2003
Online since
May 2003
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Price
$32.00
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