Paper Title:
Surfactant Selection for AM Clean in a Single Wafer Oasis Wet System
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
57-62
DOI
10.4028/www.scientific.net/SSP.92.57
Citation
J. Baker, C. Beaudry, H. Morinaga, S. Verhaverbeke, "Surfactant Selection for AM Clean in a Single Wafer Oasis Wet System", Solid State Phenomena, Vol. 92, pp. 57-62, 2003
Online since
May 2003
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Price
$32.00
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