Investigating Post CMP Cleaning Processes for STI Ceria Slurries |
| Journal |
Solid State Phenomena (Volume 92) |
| Volume |
Ultra Clean Processing of Silicon Surfaces VI |
| Edited by |
Marc Heyns, Paul Mertens and Marc Meuris |
| Pages |
63-68 |
| DOI |
10.4028/www.scientific.net/SSP.92.63 |
| Citation |
Robert Small et al., 2003, Solid State Phenomena, 92, 63 |
| Authors |
Robert Small, Pascal Berar, Brandon Scott |
| Keywords |
Buffered Chelating Solutions, Ceria Oxide Cleaning, Hydrogen Peroxide, Mass Transfer Effects |
| Full Paper |
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