Paper Title:
Investigating Post CMP Cleaning Processes for STI Ceria Slurries
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
63-68
DOI
10.4028/www.scientific.net/SSP.92.63
Citation
R. Small, P. Berar , B. Scott, "Investigating Post CMP Cleaning Processes for STI Ceria Slurries", Solid State Phenomena, Vol. 92, pp. 63-68, 2003
Online since
May 2003
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Price
$32.00
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