Paper Title:
Open Circuit Potential Analysis as a Fast Screening Method for the Quality of High-k Dielectric Layers
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
7-10
DOI
10.4028/www.scientific.net/SSP.92.7
Citation
M. Claes, T. Witters, G. Loriaux, S. Van Elshocht, A. Delabie, S. De Gendt, M. M. Heyns, H. Okorn-Schmidt, "Open Circuit Potential Analysis as a Fast Screening Method for the Quality of High-k Dielectric Layers", Solid State Phenomena, Vol. 92, pp. 7-10, 2003
Online since
May 2003
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Price
$32.00
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