Paper Title:
A New Industrial Etching & Drying Process for MEMS to Prevent Collapse of Microstructures
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
73-76
DOI
10.4028/www.scientific.net/SSP.92.73
Citation
O. Raccurt, F. Arnaud d'Avitaya, E. Charlaix, T. Vareine, F. Tardif, "A New Industrial Etching & Drying Process for MEMS to Prevent Collapse of Microstructures", Solid State Phenomena, Vol. 92, pp. 73-76, 2003
Online since
May 2003
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Price
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