Paper Title:
High Uniformity Wet Processing for Qxide Thinning and Polymer Cleaning Applications
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
81-84
DOI
10.4028/www.scientific.net/SSP.92.81
Citation
G. Wagner, K. Kinoshita, R. Sellmer, S. Fichtl, "High Uniformity Wet Processing for Qxide Thinning and Polymer Cleaning Applications", Solid State Phenomena, Vol. 92, pp. 81-84, 2003
Online since
May 2003
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Price
$32.00
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