Paper Title:
Relation between Surface Contamination of Metals and Defect Formation in Si during Oxidation of Bulk- and SOI-Wafers
  Abstract

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Periodical
Solid State Phenomena (Volume 92)
Edited by
Marc Heyns, Paul Mertens and Marc Meuris
Pages
93-96
DOI
10.4028/www.scientific.net/SSP.92.93
Citation
I. Rink, A. De Veirman, A.J. Janssen, "Relation between Surface Contamination of Metals and Defect Formation in Si during Oxidation of Bulk- and SOI-Wafers", Solid State Phenomena, Vol. 92, pp. 93-96, 2003
Online since
May 2003
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