Paper Title:
Defects in Polycrystalline Silicon Thin-Films Crystallized by Solid Phase and Excimer Laser Annealing
  Abstract

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Periodical
Solid State Phenomena (Volume 93)
Edited by
T. Fuyuki, T. Sameshima, H.P. Strunk and J.H. Werner
Pages
161-166
DOI
10.4028/www.scientific.net/SSP.93.161
Citation
K. Kitahara, K. Ohnishi, Y. Katoh, K. Watakabe, A. Moritani, "Defects in Polycrystalline Silicon Thin-Films Crystallized by Solid Phase and Excimer Laser Annealing ", Solid State Phenomena, Vol. 93, pp. 161-166, 2003
Online since
June 2003
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