Paper Title:
Low-Temperature Crystallization of Poly-SiGe Thin-Films by Solid Phase Crystallization
  Abstract

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Periodical
Solid State Phenomena (Volume 93)
Edited by
T. Fuyuki, T. Sameshima, H.P. Strunk and J.H. Werner
Pages
231-236
DOI
10.4028/www.scientific.net/SSP.93.231
Citation
K. Nakahata, M. Isomura, K. Wakisaka, "Low-Temperature Crystallization of Poly-SiGe Thin-Films by Solid Phase Crystallization ", Solid State Phenomena, Vol. 93, pp. 231-236, 2003
Online since
June 2003
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