Paper Title:
Microcrystalline Silicon Thin-Films Grown by Plasma Enhanced Chemical Vapour Deposition - Growth Mechanisms and Grain Size Control
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Periodical
Solid State Phenomena (Volume 93)
Edited by
T. Fuyuki, T. Sameshima, H.P. Strunk and J.H. Werner
Pages
257-268
DOI
10.4028/www.scientific.net/SSP.93.257
Citation
P. Roca i Cabarrocas, A. Fontcuberta i Morral, B. Kalache, S. Kasouit, "Microcrystalline Silicon Thin-Films Grown by Plasma Enhanced Chemical Vapour Deposition - Growth Mechanisms and Grain Size Control", Solid State Phenomena, Vol. 93, pp. 257-268, 2003
Online since
June 2003
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