Paper Title:
Growth of Highly <100>-Oriented Crystalline Silicon Thin Films on Molybdenum by Pulsed dc Magnetron Sputtering
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 93)
Edited by
T. Fuyuki, T. Sameshima, H.P. Strunk and J.H. Werner
Pages
287-294
DOI
10.4028/www.scientific.net/SSP.93.287
Citation
P. Reinig, F. Fenske, A. Schöpke, B. Selle, W. Fuhs, M. Nerding, H. P. Strunk, "Growth of Highly <100>-Oriented Crystalline Silicon Thin Films on Molybdenum by Pulsed dc Magnetron Sputtering ", Solid State Phenomena, Vol. 93, pp. 287-294, 2003
Online since
June 2003
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Price
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