Paper Title:
Local Electrical Properties of Non-Doped Polycrystalline Silicon Thin-Films Evaluated Using Conductive Atomic Force Microscopy
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Periodical
Solid State Phenomena (Volume 93)
Edited by
T. Fuyuki, T. Sameshima, H.P. Strunk and J.H. Werner
Pages
339-344
DOI
10.4028/www.scientific.net/SSP.93.339
Citation
Y. Aya, A. Andoh, S. Yamasaki, K. Wakisaka, "Local Electrical Properties of Non-Doped Polycrystalline Silicon Thin-Films Evaluated Using Conductive Atomic Force Microscopy ", Solid State Phenomena, Vol. 93, pp. 339-344, 2003
Online since
June 2003
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